The clean room (140 m², ISO 7 or 10000 class) is an infrastructure, localised at -1 floor of the building (LS178), which hosts all equipements dedicated to the growth, the structuration and the characterisation of matter at the micro- and nano-scale.
These technologies are, after trainings, accessible to every member of the laboratory, as well as start-ups.
The « know-how » of the plateform is around strong research topics of the LPENS, i.e. the fabrication of competitive quantum devices based on carbon materials (1D et 2D), supraconductors (Al, Nb, Ta) and III-V. Therefore the plateform has developed a recognized expertise in the fabrication and characterisation of 2D-based heterostructures and in CVD growth of carbon nanotubes.
Technologies
Equipement of the clean room are divised into 5 poles:
Electron lithographies (10 nm writing resolution), laser and UV lithographies (1μm resolution). More information …
Fluorinated reactive ion etching (RIE), Joule effect evaporation (Cr, Au, Al, …), electron beam evaporation (Au, Ti, Pd, …), oxyde deposition (ALD: Al2O3, HfO2, TiO2 and ZnO) and sputtering (Nb, Ta, …). More information …
CVD oven for annealing and carbon nanotube synthesis and a stamper the fabrication of 2D materials-based Van der Waals heterostructures. More information …
AFM, mechanical profilometer, Raman spectrometer and optical reflectometer. More information …
Diamond saw and scriber. More information …
GPNP groupement
The clean room of the physics department is also a member of the “Groupement of Micro and
Nanotechnology Platforms of Paris” (GPNP, formerly «Centrale de Proximité Paris Centre»).
This consortium pools micro-nano manufacturing technology offerings in central Paris. It brings together the cleanrooms of five Paris research institutes: the ENS, the Matériaux et Phénomènes Quantiques laboratory (MPQ, Université Paris Cité), the Institut des NanoSciences de Paris (INSP, Sorbonne Université), the Laboratoire d’étude de l’Univers et des phénomènes eXtrêmes (LUX, Observatoire de Paris) and the Institut Pierre-Gilles de Gennes (IPGG). All members of the consortium have access to the network’s cleanrooms.
This consortium belongs to the RENATECH+ national network.
Team members
The personal webpages of the members of the team can be accessed on the directory. They can be reached by email at salleblanche@phys.ens.fr
